Determining the Dielectric Tensor of Microtextured Organic Thin Films by Imaging Mueller Matrix Ellipsometry

Uniaxial anisotropy of organic thin films determined by ellipsometry

ellipsometry and Mueller matrix polarimetry

We characterized two samples consisting of photoresist layers on silicon with square arrays of square holes by spectroscopic ellipsometry (SE) and Mueller matrix polarimetry (MMP). Hole lateral dimensions and depths were determined by fitting either SE data taken in conventional planar geometry or MMP data in general conical diffraction configurations. A method for objective determination of th...

Mueller matrix ellipsometry studies of nanostructured materials

Materials can be tailored on the nano-scale to show properties that cannot be found in bulk materials. Often these properties reveal themselves when electromagnetic radiation, e.g. light, interacts with the material. Numerous examples of such types of materials are found in nature. There are for example many insects and birds with exoskeletons or feathers that reflect light in special ways. Of ...

Spectroscopic ellipsometry of metal phthalocyanine thin films.

Optical functions of cobalt phthalocyanine, nickel phthalocyanine (NiPc), and iron phthalocyanine (FePc) have been determined by use of spectroscopic ellipsometry in the spectral range 1.55-4.1 eV (300-800 nm). The samples were prepared by evaporation onto glass and silicon substrates. The optical functions were determined by point-to-point fit. Absorption spectra were also measured. The index-...

Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry

An optical surface roughness model is presented, which allows a reliable determination of the dielectric function of thin films with high surface roughnesses of more than 10 nm peak to valley distance by means of spectroscopic ellipsometry. Starting from histogram evaluation of atomic force microscopy (AFM) topography measurements a specific roughness layer (RL) model was developed for an organ...